Welcome on the NAM6 group web site
The Micro and Nano Systems (NAM6) group is developing a world-renowned expertise over many years, predominantly in the field of micro-actuation, micro-sensing, resonant devices and transduction schemes. The main objective of the NAM6 group is to tackle state-of-the-art challenges in the micro- and nano-electromechanical systems (MEMS and NEMS) fields of research by pursuing a threefold strategy:
- to benefit from the synergy of skills and know-how of the NAM6 personnel and the IEMN environment in applied physics, electronic devices, scientific instruments, modelling, process development, fabrication and characterization;
- to define research directions and objectives through a pragmatic balance of technological/scientific-pushed and application-pulled considerations;
- to address the research topics from fundamental understanding and physical modelling, to device fabrication and evaluation, and furthermore to system integration and potential technological transfer.
By taking advantage of the cleanroom facilities at IEMN, micro- and nano-machining techniques have been effectively employed to explore and convert physical effects and material properties into devices/systems for applications. Research activities concern:
- Giant piezoresistive effects in silicon and its nanostructures,
- MEMS devices based on gallium nitride,
- MEMS resonators for application as high-frequency atomic force microscopy sensors
- Instrumentation for nano-characterization.